| 结晶性和粒子尺寸对C60薄膜晶体管迁移率的影响 |
| Effect of Crystallinity and Grain Size of Film on Mobility of C60 Thin Film Transistors |
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| 摘要: 采用真空沉积方法在不同基片温度（30~190℃）和沉积压力（1×10-4和1×10-1 Pa）下制得了C60薄膜。研究了薄膜的结晶性和晶粒尺寸对迁移率的影响。采用X射线衍射和原子力显微镜表征了薄膜的结构和形貌，发现提高基片温度，薄膜的结晶性和晶粒尺寸均提高；提高沉积压力，薄膜的晶粒尺寸增大而结晶性不变。场效应测试结果表明，C60薄膜的迁移率与其结晶性密切相关，高的结晶性有利于获得高迁移率；不同于平面有机半导体材料，对于球状C60半导体材料，大的晶粒尺寸可能导致低迁移率。 |
| 关键词: 富勒烯 薄膜晶体管 迁移率 结晶性 晶粒尺寸 |
| 基金项目: 国家自然科学基金（No.61504062）、江苏省自然科学基金（No.BK20150863）和南京邮电大学引进人才基金（No.NY214183）资助项目。 |
| Abstract: Fullerene (C60) thin films have been prepared on SiO2 substrates by vacuum deposition under different substrate temperature ranging from 30 to 190℃ and deposition pressure of 1×10-4 and 1×10-1 Pa. The effect of crystallinity and grain size on the mobility of the deposited C60 thin films are investigated. X-ray diffraction and atomic force microscopy observation indicates that both the crystallinity and the grain size of the C60 films increase with increasing substrate temperature. And the grain size of the films increase and the crystallinity keep almost unchanged with increasing deposition pressure. Field-effect measurements indicate that the mobilities of the C60 thin films are closely correlated with their crystallinities, and the increased crystallinity of the films gives the improved mobility. Different from the films of planar organic semiconducrors molecules, for the spherical C60 molecules films, the larger grain size could lead to the lower mobility. |
| Keywords: fullerene thin film transistors mobility crystallinity grain size |
| 投稿时间：2017-08-31 修订日期：2017-11-27 |
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| 李谊,韩笑,孙志鹏,马延文.结晶性和粒子尺寸对C60薄膜晶体管迁移率的影响[J].无机化学学报,2018,34(3):415-420. |
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