| 不同厚度三倍频SiO2增透膜的设计、制备与改性 |
| Design, Preparation and Modification of Third-Harmonic Silica Antireflective Coatings with Different Thickness |
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| 摘要: 本文通过光学计算设计了具有不同厚度的三倍频增透膜。以氨水为催化剂、正硅酸乙酯(TEOS)为前驱体，通过溶胶-凝胶(Sol-Gel)技术制得SiO2溶胶；采用浸渍提拉法镀膜得到符合设计要求的三倍频增透膜。研究结果表明，增透膜的耐磨擦性能随着膜层厚度的增大而增大，本文制得的厚度达到200 nm以上的三倍频增透膜耐磨擦性能显著优于传统的1/4波长三倍频增透膜。此外，本文以甲基含氢硅油为膜表面修饰剂，提出一种全新的超快的表面疏水性改性的方法。经该方法处理后，增透膜由亲水膜转变为疏水膜，对水的接触角从23.4°增大至95°，增透膜的耐环境性显著提高。 |
| 关键词: 溶胶-凝胶技术 三倍频 增透膜 甲基含氢硅油 耐磨擦性 耐环境性 |
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| Abstract: Third-harmonic antireflective (AR) coatings with different thickness were designed via optical formula in this work. Using tetraethylorthosilicate (TEOS) as precursor and ammonia as catalyst, SiO2 sol was prepared by sol-gel process. The designed AR coatings were obtained by dip-coating process. It is found that the abrasion-resistance of AR coatings increased with film thickness, indicating that the abrasion-resistance of third-harmonic AR coatings prepared in this work is much better than that of the traditional quarter-wave third-harmonic AR coating. In addition, a totally new and super-fast surface modification method was proposed by using methyl hydrogen silicone oil as modifier. The water contact angle of AR coating increased from 23.4° to 95° after the surface modification. |
| Keywords: Sol-Gel process third-harmonic antireflective coating methyl hydrogen silicone oil abrasion-resistance environment-resistance |
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| 张雨露,张欣向,业海平,晏良宏,江 波.不同厚度三倍频SiO2增透膜的设计、制备与改性[J].无机化学学报,2012,28(1):119-124. |
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