无机化学学报

放电等离子烧结制备锑掺杂氧化锡陶瓷研究

Fabrication of Antimony Doped Tin Oxide Ceramics by Spark Plasma Sintering Technique

作者	单位
张建荣	华东理工大学化学系，教育部结构可控先进功能材料及其制备重点实验室，上海 200237 中国科学院上海硅酸盐研究所，上海 200050
徐秀娟	华东理工大学化学系，教育部结构可控先进功能材料及其制备重点实验室，上海 200237
李秀花	华东理工大学化学系，教育部结构可控先进功能材料及其制备重点实验室，上海 200237
高　濂	中国科学院上海硅酸盐研究所，上海 200050
孙　静	中国科学院上海硅酸盐研究所，上海 200050

摘要:

关键词: 锑掺杂氧化锡(ATO) 透明导电氧化物烧结陶瓷靶材

基金项目:

Abstract: Antimony doped tin oxide(ATO) nanoparticles with specific surface area of 58.7 m²·g^-1 and low degree of agglomeration were synthesized by hydrothermal and post calcination method. Using this ATO as starting material, ATO ceramics with relative density of 97.4% and resistivity of 0.004 64 Ω·cm^-1 were fabricated by Spark Plasma Sintering(SPS) Technique at 850 ℃. XRD patterns of the ATO ceramics show that the 800 ℃ sintered pellet exhibits(211) preferred orientation. SEM micrographs also show that the morphology of the ATO grains changes with increasing in sintering temperature. Further increase in sintering temperature to 900 ℃ will result in the reduction of the ATO to metal tin.

Keywords: ATO transparent conductive oxide sintering ceramic target

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张建荣,徐秀娟,李秀花,高　濂,孙　静.放电等离子烧结制备锑掺杂氧化锡陶瓷研究[J].无机化学学报,2010,26(6):1100-1104.

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