| 自组装制备二氧化铪图案化薄膜 | |
| Self-assembled Monolayers Preparation of Patterned HfO2 Thin Film | |
| 摘要: 采用短波紫外光(UV)在十八烷基三氯硅烷(OTS)自组装单分子层刻蚀不同的微型图案，利用液相自组装技术在OTS模板表面沉积HfO2图案化薄膜。通过XRD、AFM、SEM、EDS等测试手段对OTS膜和HfO2薄膜进行表征，结果表明：以OTS为模板利用液相自组装技术成功制备出边缘轮廓清晰、粗糙度较小、条纹宽度为10μm的立方晶型的HfO2图案化薄膜。 | |
| 关键词: OTS-SAMs 图案化 HfO2薄膜 | |
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| Abstract: Different kinds of micro-patterns were created within octadecyltrichlorosilane (OTS) self-assembled monolayers utilizing UV lithography. The HfO2 pattern films have been formed on silanol SAMs by the liquid-phase deposition (LPD) method. The crystal phase composition, microstructure and topography of the as-prepared films were characterized by various techniques, including X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and energy disperse spectroscopy (EDS). The results indicate that the HfO2 pattern films were successfully prepared by the self-assembled monolayers, and the thin films had cubic pattern microstructure of HfO2, 10 μm deposited lines width and small line edge roughness. | |
| Keywords: OTS-SAMs nano-pattern HfO2 films | |
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| 谈国强,贺中亮,苗鸿雁,刘 剑,夏 傲,娄晶晶.自组装制备二氧化铪图案化薄膜[J].无机化学学报,2009,25(10):1853-1857. | |
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