| V含量对ZnO薄膜结构及光学特性的影响 | |
| Effect of Vanadium Content on Structure and Optical Properties of Doped ZnO | |
| 摘要: | |
| 关键词: ZnO薄膜 V掺杂 直流反应共溅射 光学性质 | |
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| Abstract: Vanadium-doped zinc oxide thin films with preferred c-axis orientation were deposited on glass substrates by DC-reactive co-sputtering. The deposited films were characterized by SEM, EDS, XRD and optical transmittance spectrum. The effect of V doping on the structural and optical properties of ZnO thin films was studied. It is found that the sample has a highly c-axis orientation and a comparatively good crystallization with lower mass percentage of vanadium doping. All the V-dopped ZnO thin films are in compressive stress condition and compression stress increases as vanadium content is increased. Refractive index n is lowered firstly and then increased, while extinction coefficient k has a trend of rising, and optical band gap rises a little bit firstly and then diminishes obviously when vanadium content is increased. | |
| Keywords: ZnO thin films V-doped DC reactive co-sputtering optical property | |
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| 阮宜斌,孟立建,梁二军.V含量对ZnO薄膜结构及光学特性的影响[J].无机化学学报,2006,22(12):2247-2252. | |
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