| Pechini 方法制备铌酸锂薄膜的研究 |
| Preparation of LiNbO3 Thin Films by Pechini Method |
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| 摘要: 采用Pechini方法，以柠檬酸为配位剂与金属离子配位，在Pt/Ti/SiO2/Si基片上制备了多晶铌酸锂(LiNbO3)薄膜。以13C核磁共振、拉曼光谱和红外光谱分析研究了柠檬酸与金属离子的配位情况，提出了一种Nb-柠檬酸配合物可能的分子结构，即柠檬酸作为三齿配体，以端羧基、-OH和中间羧基与Nb离子配位。以TG-DTA对Li-Nb凝胶前驱体的热分解历程进行分析，以拉曼光谱和XRD分析了LiNbO3薄膜在不同温度下热处理的相组成和结构。结果表明，600 ℃下退火2 h可得到单相多晶LiNbO3薄膜，薄膜表面致密、平整，晶粒的平均尺寸为50 nm。 |
| 关键词: LiNbO3薄膜 Pechini方法 Nb-柠檬酸配合物 |
| 基金项目: |
| Abstract: Lithium niobate thin films have been deposited on Pt/Ti/SiO2/Si(100) substrates by using Pechini method. The metal cations are chelated in an aqueous solution with citric acid as chelating agent. The chemistry of the metal-citric acid solutions has been characterized by carbon nuclear magnetic resonance spectroscopy ( 13C NMR), Raman spectroscopy and Fourier transform infrared (FTIR). A possible molecular structure of Nb-citric acid complex is proposed, i.e. citric acid coordinates to Nb5+ ion through one terminal carboxyl group, the hydroxyl group, and the central carboxyl group as a tridentate ligand. The thermal decomposition of Li-Nb precursors gels has been studied by TG/DTA and films annealed at different temperatures have been characterized by XRD and Roman spectroscopy. The results show that by heat-treatment at 600 ℃ for 2 h, polycrystalline LiNbO3 thin films with smooth and crack-free surface could be achieved. The average grain size of the films is about 50 nm. |
| Keywords: LiNbO3 thin films Pechini method Nb-citric acid complex |
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| 赵九蓬,强亮生,权茂华,张蕾.Pechini 方法制备铌酸锂薄膜的研究[J].无机化学学报,2006,22(11):1957-1961. |
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