MWPCVD低温合成纳米碳管的生长机理
Mechanism of Carbon Nanotubes Growth Through MWPCVD at Low Temperature
作者单位
王升高 中国科学院等离子体物理研究所,合肥 220031
武汉化工学院材料科学与工程系,武汉 430073 
汪建华 武汉化工学院材料科学与工程系,武汉 430073 
满卫东 武汉化工学院材料科学与工程系,武汉 430073 
马志彬 武汉化工学院材料科学与工程系,武汉 430073 
王传新 中国科学院等离子体物理研究所,合肥 220031
武汉化工学院材料科学与工程系,武汉 430073 
摘要: 
关键词: 纳米碳管 微波等离子体化学气相沉积法 低温 生长机理
基金项目: 
Abstract: The synthesis of carbon nanotubes (CNTs) at low temperature has received a great deal of attention and be-comes a challenging issue. But few model which accounts for the growth of CNTs is suited for the synthesis of CNTs by microwave plasma chemical vapor deposition (MWPCVD) at low temperature because most researchers conclude that the growth mechanism is determined by the catalyst-supporter interaction while ignored the diffusion of carbon in the catalyst. In this paper, under the catalytic effect of cobalt supported by SiO2 and Al2O3, CNTs are synthe-sized by MWPCVD at about 500℃, and tip-growth, the model which accounts for the catalytic growth of CNTs is outlined. It is the temperature difference between the upper and bottom of the catalytic particle that results in the diffusion of carbon atoms from upper to the bottom, and precipitation of saturated carbon on the bottom surface to form CNTs.
Keywords: carbon nanotubes MWPCVD low temperature growth mechanism
 
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王升高,汪建华,满卫东,马志彬,王传新.MWPCVD低温合成纳米碳管的生长机理[J].无机化学学报,2002,18(6):611-614.
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