| LaFeO3纳米晶薄膜及其气敏特性的研究 |
| STUDY ON LaFeO3 NANOCRYSTALLINE THIN FILMS AND ITS GAS-SENSITVE PROPERTIES |
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| 摘要: 本文采用溶胶-凝胶方法,经过550℃、1小时的固相反应,得到粒径为40～45nm,均匀性良好的LaFeO3纳米晶薄膜。将这一成膜技术与集成电路平面工艺相结合,首次研制出了NCF-OSFET气敏元件,它对乙醇具有较高的灵敏度和良好的选择性。 |
| 关键词: LaFeO3 溶胶—凝胶法 纳米晶薄膜 MOS场效应晶体管 气敏元件 |
| 基金项目: 高等学校博士学科点专项科研基金;集成光电子学国家重点联合实验室资助 |
| Abstract: The precursors of LaFe03 were prepared by sol-gel method and nanocrystalline film of the LaFe03 were obtained by a solid phase reaction at about 550℃ for 1 hour. The thicknesses of the nanocrytalline film are uniformly distributed, and their crystal sizes are 40～45nm. Combining this thin film technology with planar technique of integrated circuit, we have developed NCF-0SFET gas sensor for the first time. This device not only has good sensitivity to ethanol, but also has excellent selectivity. |
| Keywords: lanthanum ferrite sol-gel method nanocrystalline film MOS field effect translator gas sensor |
| 投稿时间：1993-12-29 |
| 摘要点击次数: 1309 |
| 全文下载次数: 1675 |
| 赵善麒,才宏,彭作岩,赵纯,徐宝琨,赵慕愚,邢建力.LaFeO3纳米晶薄膜及其气敏特性的研究[J].无机化学学报,1994,10(4):409-412. |
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